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Introducing

MODU-LAB

Planar Process Learning By Doing

MODU-LAB was designed from ground up to be safe and economical to own, operate and maintain. MODU-LAB allows you to teach the basics of planar processing safely and inexpensively.

MODU-LAB was designed to meet the needs of a growing semiconductor manufacturing laboratory instructional program. There are a number of options available, depending on your available facilities and budgetary constraints. All can be upgraded and expanded over time with no loss of initial investment. The MODU-LAB training system (furnaces excluded) is available in 110 VAC or 220 VAC versions.

MODU-LAB processes have been custom engineered to meet the constraints of the teaching lab environment. With maximum safety, minimum waste generation and the lowest cost of ownership, MODU-LAB is the only affordable laboratory option for semiconductor manufacturing technician training.

The Only cost effective alternative to

Used Equipment

Oxidation/ diffusion MODULE: The base unit is a 3 zone, PID controlled, diffusion furnace. The unit will process wafers at temperatures up to 1000°C (1250°C on the Diffusion Module) with a programmable controller allowing over night runs of up to 25 wafers. The furnace features a stainless steel scavenger, quartzware, gas delivery system and vacuum wand. Options include a water bubbler for Wet Oxidation and Mass Flow Controller or Rotameter gas control. The Diffusion module requires 208 VAC 3ph @ 40 A or 220 VAC 1ph @ 60A.

Modu-Lab Oxidation Furnace Module

Photolithography MODULE: Designed from the ground up to be safe and economical to own, operate and maintain. The base unit consists of a variable 2 speed wafer spinner, a hotplate designed for wafer resist bake and the align and expose tower with capabilities that will support 100 micron minimum feature size. The Modu-Lab align and expose tower is designed to accomodate masks made from acetate transparences. This feature allows the use of a laser or inkjet printer and readily available presentation transparences for mask making. The spinner and bake plate are exhausted to minimize exposure to resist vapors. The spinner also features a waste capture bottle in the exhausted housing. All electrical is interlocked 110 volts ac (220 VAC version available).

Modu-Lab Photolithography Module

Vacuum / PVD module: This 120 VAC, 15A system is turbo pumped with full scale pressure measurement and a multi purpose chamber. The large viewport and mirror assembly allow users to observe the ion guage, the turbo, and (of course) the source. Two options are available: Manual and Electro-Pnuematic. The manual system is full manual. The electro-pneumatic system has interlocked controls that prevent equipment damage should the wrong switch be actuated. Currently the system will deposit evaporants that won't form a eutectic alloy with tungsten. Aluminum and Copper have both been evaporated successfully. Future options are planned that will include configurations for RF discharge and DC magnetron sputtering. All options will be classroom interchangeable in less than one hour to support various experiments..

Modulab Physical Vapor Deposition Module

wet process module: Designed to minimize hazardous waste generation and exhaust requirements, the Modu-Lab wet process module is designed for single wafer processing. All tanks are of minimum dimension to allow approximately 200 cc of chemical usage per tank. Tanks drain directly into 1 gallon waste bottles with secondary containment. This feature allows for safe and convenient transport. Required lab facilities for the wet process module are electricity and an outside vent. All electrical components are interlocked eliminating shock hazards. The result is an extremely safe, economical, and easy to use piece of equipment.

Modu-Lab Wet Process Module

Chemicals, Personal Protective Equipment, Oxidized Silicon Wafers, EMS carries a full line of products specifically engineered to support MODU-LAB experiments. Call for more details.

Modu-lab Training Solution

A full blown clean room filled with intricate production tools is a superb research resource and can be effectively used for teaching, Unfortunately this type of facility can be cost prohibitive. Just the installation if some production tools can cost more than an entire set of Modu-Lab modules, delivered, installed, and running! For more background on Semiconductor Manufacturing Technician Training and additional links to other training sites, see the Modu-Lab page of this site. The Modu-Lab User Group contains all of the resources needed to build a world class program. There is a slide show of the Modu-Lab demonstration at Dominion Semiconductor by Northern Virginia Community College.

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