Modu-Lab Price List

Prices are in U.S. Dollars. Freight, Taxes, Tariffs and International Distributor Fee's Additional

Module	Desig	Quoted Price
Wet Etch Module	WEM
Wet Process Module	WPM
Photolithography Module	PLM
Oxidation Furnace Module	OFM
P Type Diffusion Furnace Module	DFM
N Type Diffusion Furnace Module	DFM
Physical Vapor Deposition Module	PVM
Device Characterization Module	DCM
Leak Detection Module	LDM
Metrology Module	MMM
Metrology Module II	MMM II
Chemical Vapor Deposition Module (TEOS)	CVM
PVD Ultra	PVDM
Process Supply Kit	PSK
Automated Furnace - 6990815371	OFMS
MFC Gas Loops (per loop)	GMFC
Special Energy Kits
Discounts for Multiple Modules		contact

EMS reserves the right to refuse orders.

Q2 - 2005 Bugetary prices valid 1/1/2005 through 3/31/2005

Contact EMS for firm quotation and terms

Prices are in U.S. Dollars. Freight, Taxes, Tariffs, International Distributor fees Additional

Module	Desig	Quoted Price
Wet Etch Module	WEM
Wet Process Module	WPM
Photolithography Module	PLM
Oxidation Furnace Module	OFM
P Type Diffusion Furnace Module	DFM
N Type Diffusion Furnace Module	DFM
Physical Vapor Deposition Module	PVM
Device Characterization Module	DCM
Leak Detection Module	LDM
Metrology Module	MMM
Metrology Module II	MMM II
Chemical Vapor Deposition Module	CVM
PVD Ultra	PVDM
Process Supply Kit	PSK
Installation Package (includes freight, setup, 25 wafers and detailed training session)	ISP
Discounts for Multiple Modules		contact

Quoted Prices are only valid if order and payment are received before the end of the quotation period.